Abstract
Carbon nanostructures with chemical vapor deposition (CVD) were successfully
grown on silicon (100) pre-coated with gold nanoparticles as a catalyst using
electrochemical method. Different thicknesses of gold films (10nm, 20nm, 80nm,140nm,
170nm, and 280nm) were used. These films were thermally annealed at temperature of
600ºC for 1h with argon environment. The CNTs were grown at 700ºC, argon and
acetylene as a precursor source of carbon (Ar -500sccm, C2H2 -200sccm). The gold
deposition after annealing was characterized by atomic force microscopy (AFM). The
produced carbon nanostructures were also characterized with scanning electron
microscope (SEM), and transmission electron microscope (TEM). The observed carbon
structures of the SEM and TEM results are straight, curved, helical, and Y-junction with
diameter rang of 100nm-200nm, which is attributed to carbon nano fibers with different
size and shape of gold catalyst nanoparticles.
grown on silicon (100) pre-coated with gold nanoparticles as a catalyst using
electrochemical method. Different thicknesses of gold films (10nm, 20nm, 80nm,140nm,
170nm, and 280nm) were used. These films were thermally annealed at temperature of
600ºC for 1h with argon environment. The CNTs were grown at 700ºC, argon and
acetylene as a precursor source of carbon (Ar -500sccm, C2H2 -200sccm). The gold
deposition after annealing was characterized by atomic force microscopy (AFM). The
produced carbon nanostructures were also characterized with scanning electron
microscope (SEM), and transmission electron microscope (TEM). The observed carbon
structures of the SEM and TEM results are straight, curved, helical, and Y-junction with
diameter rang of 100nm-200nm, which is attributed to carbon nano fibers with different
size and shape of gold catalyst nanoparticles.
Keywords
CNT's Nanostructures; CNT's Synthesis
Gold Catalyst.