Abstract
Before using any sputtering system, the extent of the operating pressures and voltages must be
known by studying the breakdown curve with the product of the working pressure times the
inter electrode distance. In this paper, argon breakdown by dc electrical potentials was
experimentally studied. Paschen curves for argon gas were obtained by measuring the
breakdown voltage of argon using gold target. These curves display that the breakdown
voltage in Ar gas between two planer electrodes comparable with (P. d). The I-V
characteristics of the plasma discharge point to that the discharge is working in the abnormal
glow region.
known by studying the breakdown curve with the product of the working pressure times the
inter electrode distance. In this paper, argon breakdown by dc electrical potentials was
experimentally studied. Paschen curves for argon gas were obtained by measuring the
breakdown voltage of argon using gold target. These curves display that the breakdown
voltage in Ar gas between two planer electrodes comparable with (P. d). The I-V
characteristics of the plasma discharge point to that the discharge is working in the abnormal
glow region.